2 article(s) from Soppera, Olivier
Surface improvement of organic photoresists using a near-field-dependent etching method
- Felix J. Brandenburg,
- Tomohiro Okamoto,
- Hiroshi Saito,
- Benjamin Leuschel,
- Olivier Soppera and
- Takashi Yatsui
Beilstein J. Nanotechnol. 2017, 8, 784–788, doi:10.3762/bjnano.8.81
Challenges in realizing ultraflat materials surfaces
- Takashi Yatsui,
- Wataru Nomura,
- Fabrice Stehlin,
- Olivier Soppera,
- Makoto Naruse and
- Motoichi Ohtsu
Beilstein J. Nanotechnol. 2013, 4, 875–885, doi:10.3762/bjnano.4.99
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